✦ LIBER ✦
Characterisation of rough silicon surfaces using spectroscopic ellipsometry, reflectance, scanning electron microscopy and scattering measurements
✍ Scribed by C. Pickering; R. Greef; A.M. Hodge
- Publisher
- Elsevier Science
- Year
- 1990
- Tongue
- English
- Weight
- 423 KB
- Volume
- 5
- Category
- Article
- ISSN
- 0921-5107
No coin nor oath required. For personal study only.
✦ Synopsis
A critical comparison of several techniques for the evaluation of imperfections in sificon-onsapphire (SOS) wafers leads to the adoption of a model of the SOS surface based on an effective medium approximation treatment of the ellipsometric" results.