A spectroscopic immersion ellipsometry study of SiO2-Si interface roughness for electron cyclotron resonance plasma and thermally oxidized Si surfaces

✍ Scribed by C. Zhao; P.R. Lefebvre; E.A. Irene

• Book ID: 114086326
• Publisher: Elsevier Science
• Year: 1998
• Tongue: English
• Weight: 321 KB
• Volume: 313-314
• Category: Article
• ISSN: 0040-6090
• DOI: 10.1016/s0040-6090(97)00834-1