Simulation of scanning capacitance micro
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L. Ciampolini; F. Giannazzo; M. Ciappa; W. Fichtner; V. Raineri
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Article
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2001
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Elsevier Science
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English
⚖ 128 KB
In this work we compare simulations of SCM measurements on bevelled and micro-sectioned samples for investigating the impact of the carrier spilling effect. Simulation results are validated by experimental data obtained from dedicated samples calibrated by spreading resistance profiling. We show tha