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Influence of d.c. substrate bias voltage on growth of cubic boron nitride films by radio frequency sputter

✍ Scribed by Deng, Jinxiang; Wang, Bo; Tan, Liwen; Cui, Bentao; Yan, Hui; Chen, Guanghua; Wong, S.P; Kwok, R.W.M; Lau, Leo W.M


Book ID
121467479
Publisher
Elsevier Science
Year
2000
Tongue
English
Weight
98 KB
Volume
9
Category
Article
ISSN
0925-9635

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