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Growth of c-axis orientation ZnO films on polymer substrates by radio-frequency magnetron sputtering

โœ Scribed by Kaixin Chen; Kin Seng Chiang; Hau Ping Chan; Pak Lim Chu


Publisher
Elsevier Science
Year
2008
Tongue
English
Weight
801 KB
Volume
30
Category
Article
ISSN
0925-3467

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YBa,Cu,O,\_x superconducting thin films with a-axis perpendicular to the substrate were grown on both LaSrGaO, (100) and SrTiO, (100) single crystals by off-axis rf sputtering and their properties were compared. The film grown at 740 "C on a self-template layer grown in situ at 650 "C on LaSrGaO, (1