Growth Behavior of Cubic Boron Nitride Films in a Two-Step Process: Changing Bias Voltage, Gas Composition, and Substrate Temperature

✍ Scribed by W.J. Zhang; S. Matsumoto; Q. Li; I. Bello; S.T. Lee

• Publisher: John Wiley and Sons
• Year: 2002
• Tongue: English
• Weight: 294 KB
• Volume: 12
• Category: Article
• ISSN: 1616-301X
• DOI: 10.1002/1616-3028(20020418)12:4<250::aid-adfm250>3.0.co;2-l