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Influence of CH[sub 4] on the morphology of nanocrystalline diamond films deposited by Ar rich microwave plasma

✍ Scribed by Rakha, Sobia Allah; Yu, Guojun; Cao, Jianqing; He, Suixia; Zhou, Xingtai

Book ID: 121719782
Publisher: American Institute of Physics
Year: 2010
Tongue: English
Weight: 696 KB
Volume: 107
Category: Article
ISSN: 0021-8979
DOI: 10.1063/1.3410804

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