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Influence of background impurities on the formation of stacking faults in silicon wafers

✍ Scribed by D. I. Brinkevich; V. S. Prosolovich; S. A. Vabishchevich; A. N. Petlitskii


Book ID
110214240
Publisher
Springer
Year
2006
Tongue
English
Weight
137 KB
Volume
35
Category
Article
ISSN
1063-7397

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