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Formation of stacking faults and dislocations in phosphorus diffused silicon

✍ Scribed by W.F. Tseng; S.S. Lau; J.W. Mayer

Publisher: Elsevier Science
Year: 1978
Tongue: English
Weight: 457 KB
Volume: 68
Category: Article
ISSN: 0375-9601
DOI: 10.1016/0375-9601(78)90768-5

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