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Influence of Ar/C2H2 ratio on the structure of hydrogenated carbon films

✍ Scribed by Liutauras Marcinauskas; Alfonsas Grigonis; Vitas Valincius

Book ID: 116671788
Publisher: Elsevier Science
Year: 2009
Tongue: English
Weight: 531 KB
Volume: 355
Category: Article
ISSN: 0022-3093
DOI: 10.1016/j.jnoncrysol.2009.05.009

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