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Dissociative Excitation of C2H2in the Electron Cyclotron Resonance Plasma of Ar: Production of CH(A2Δ) Radicals and Formation of Hydrogenated Amorphous Carbon Films

✍ Scribed by Haruhiko Ito; Katsuaki Koshimura; Saori Onitsuka; Kohtaro Okada; Tsuneo Suzuki; Hiroki Akasaka; Hidetoshi Saitoh

Book ID: 113077528
Publisher: Springer
Year: 2012
Tongue: English
Weight: 730 KB
Volume: 32
Category: Article
ISSN: 0272-4324
DOI: 10.1007/s11090-012-9355-2

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