Influence of precursor gases on the structure of plasma deposited amorphous hydrogenated carbon–nitrogen films

✍ Scribed by Franceschini, D. F.; Freire, F. L.; Silva, S. R. P.

• Book ID: 126911944
• Publisher: American Institute of Physics
• Year: 1996
• Tongue: English
• Weight: 242 KB
• Volume: 68
• Category: Article
• ISSN: 0003-6951
• DOI: 10.1063/1.116268