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Influence of additional UV-light illumination on preparation of TiN by ion beam assisted deposition

✍ Scribed by H. Wengenmair; J.W. Gerlach; M. Zeitler; T. Kraus; B. Rauschenbach; H. Huber; W. Assmann

Book ID: 114168440
Publisher: Elsevier Science
Year: 1996
Tongue: English
Weight: 388 KB
Volume: 120
Category: Article
ISSN: 0168-583X
DOI: 10.1016/s0168-583x(96)00528-9

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