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Study on nanostructural morphology of Si3N4/TiN multilayer synthesized by ion beam assisted deposition

✍ Scribed by L.D Wang; J.L He; X.M He; J Wang; Y.H Wang; W.Z Li; H.D Li


Book ID
114169557
Publisher
Elsevier Science
Year
1998
Tongue
English
Weight
386 KB
Volume
135
Category
Article
ISSN
0168-583X

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