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Crystallographic structure of δ-TiN films prepared by photon and ion beam assisted deposition

✍ Scribed by H. Wengenmair; J.W. Gerlach; U. Preckwinkel; B. Stritzker; B. Rauschenbach

Book ID: 113287424
Publisher: Elsevier Science
Year: 1996
Tongue: English
Weight: 441 KB
Volume: 113
Category: Article
ISSN: 0168-583X
DOI: 10.1016/0168-583x(95)01410-1

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