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Incorporation of indium and gallium in atomic layer epitaxy of InGaAs on InP substrates

✍ Scribed by Yong Huang; Jae-Hyun Ryou; Russell D. Dupuis

Publisher: Elsevier Science
Year: 2011
Tongue: English
Weight: 724 KB
Volume: 321
Category: Article
ISSN: 0022-0248
DOI: 10.1016/j.jcrysgro.2011.02.039

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