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Incorporation of implanted In and Sb in silicon during amorphous layer regrowth

✍ Scribed by Blood, P.; Brown, W. L.; Miller, G. L.

Book ID: 120013459
Publisher: American Institute of Physics
Year: 1979
Tongue: English
Weight: 987 KB
Volume: 50
Category: Article
ISSN: 0021-8979
DOI: 10.1063/1.325686

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