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Redistribution of ytterbium and oxygen in annealing of silicon layers amorphized by implantation

โœ Scribed by O. V. Aleksandrov; Yu. A. Nikolaev; N. A. Sobolev; R. Asomoza; Yu. Kudriavtsev; A. Villegas; A. Godines


Book ID
110137311
Publisher
Springer
Year
2003
Tongue
English
Weight
69 KB
Volume
37
Category
Article
ISSN
1063-7826

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