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In situ stress measurements during the MOCVD growth of AlN buffer layers on (1 1 1) Si substrates

✍ Scribed by Srinivasan Raghavan; Joan M Redwing

Book ID: 108165662
Publisher: Elsevier Science
Year: 2004
Tongue: English
Weight: 257 KB
Volume: 261
Category: Article
ISSN: 0022-0248
DOI: 10.1016/j.jcrysgro.2003.11.020

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In situ stress measurements during the MOCVD growth of AlN buffer layers on (1&#xa0;1&#xa0;1) Si substrates

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