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In Situ Nitrogen and Aluminum Doping in Migration Enhanced Embedded Epitaxial Growth of 4H-SiC

✍ Scribed by Schöner, Adolf; Sugiyama, Naohiro; Takeuchi, Yuuichi; Malhan, Rajesh Kumar

Book ID: 120880265
Publisher: Trans Tech Publications, Ltd.
Year: 2008
Tongue: English
Weight: 659 KB
Volume: 600-603
Category: Article
ISSN: 1662-9752
DOI: 10.4028/www.scientific.net/MSF.600-603.175

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