✦ LIBER ✦
Growth of thick and low-doped 4H-SiC epitaxial layers in a vertical radiant-heating VPE reactor
✍ Scribed by Hidekazu Tsuchida; Isaho Kamata; Tamotsu Jikimoto; Kunikazu Izumi
- Publisher
- John Wiley and Sons
- Year
- 2002
- Tongue
- English
- Weight
- 380 KB
- Volume
- 138
- Category
- Article
- ISSN
- 0424-7760
- DOI
- 10.1002/eej.1134
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