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In situ laser reflectometry study of the amorphization of silicon carbide by MeV ion implantation

✍ Scribed by Henkel, T.; Heera, V.; Kögler, R.; Skorupa, W.


Book ID
121225697
Publisher
American Institute of Physics
Year
1998
Tongue
English
Weight
440 KB
Volume
84
Category
Article
ISSN
0021-8979

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