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The crystallisation of deep amorphous wells in silicon produced by ion implantation

โœ Scribed by A.C.Y Liu; J.C McCallum; J Wong-Leung


Book ID
114164651
Publisher
Elsevier Science
Year
2001
Tongue
English
Weight
274 KB
Volume
175-177
Category
Article
ISSN
0168-583X

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