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Real-time in situ study of hydrogen diffusion in amorphous Si formed by ion implantation

✍ Scribed by D. Smeets; B.C. Johnson; J.C. McCallum; C.M. Comrie

Book ID: 113823621
Publisher: Elsevier Science
Year: 2011
Tongue: English
Weight: 641 KB
Volume: 269
Category: Article
ISSN: 0168-583X
DOI: 10.1016/j.nimb.2011.07.103

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