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Deposition of Amorphous Hydrogenated Silicon (a-Si:H): in situ Gas Analysis by Time-of-Flight Mass Spectrometry

✍ Scribed by Gudrun Andrä; Fritz Falk; Herbert Stafast; Ewa Witkowicz


Publisher
Springer Vienna
Year
1999
Tongue
English
Weight
93 KB
Volume
130
Category
Article
ISSN
0026-9247

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