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In situ infrared spectroscopic ellipsometry for blanket aluminum chemical vapor deposition on TiN and on SiO2/Si

✍ Scribed by M Weidner; G Weidner; A Hausmann; G Ritter

Book ID: 114086408
Publisher: Elsevier Science
Year: 1998
Tongue: English
Weight: 263 KB
Volume: 313-314
Category: Article
ISSN: 0040-6090
DOI: 10.1016/s0040-6090(97)00988-7

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