In Situ Detection of Surface SiHn in Synchrotron-Radiation-Induced Chemical Vapor Deposition of a-Si on an SiO2 Substrate

✍ Scribed by Yoshigoe, A. ;Nagasono, M. ;Mase, K. ;Urisu, T. ;Seki, S. ;Nakagawa, Y.

• Book ID: 114529276
• Publisher: International Union of Crystallography
• Year: 1995
• Tongue: English
• Weight: 530 KB
• Volume: 2
• Category: Article
• ISSN: 0909-0495
• DOI: 10.1107/s0909049595006091