✦ LIBER ✦
High quality SiO2 gate insulator suitable for poly-Si TFTs on plastic substrates employing inductively coupled plasma-chemical vapor deposition with N2O plasma treatment and excimer laser annealing
✍ Scribed by Sang-Myeon Han; Moon-Young Shin; Joong-Hyun Park; Min-Koo Han
- Book ID
- 116669025
- Publisher
- Elsevier Science
- Year
- 2006
- Tongue
- English
- Weight
- 331 KB
- Volume
- 352
- Category
- Article
- ISSN
- 0022-3093
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