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In situ growth of evaporated TiO[sub 2] thin films using oxygen radicals: Effect of deposition temperature

✍ Scribed by Grahn, J. V.

Book ID
121267672
Publisher
AVS (American Vacuum Society)
Year
1998
Tongue
English
Weight
561 KB
Volume
16
Category
Article
ISSN
0734-2101

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High quality YBa2Cu307 thin films have been grown in situ on various substrates using MBE techniques and an ozone jet The best films so far were grown on SrTi03 and had a Tc,onset of 88 K and a TcO of 80 K. One 200 nm thick film grown on bare silicon had a TC,onset of 88 K and a TcO of 60 K. This fi