In situ growth of high temperature superconductor thin films with evaporation techniques using ozone as an oxygen source

✍ Scribed by H.M. Appelboom; J.P. Adriaanse; H.I. de Groot; G. Rietveld; D. van der Marel; J.E. Mooij; R. de Reus

• Publisher: Elsevier Science
• Year: 1990
• Tongue: English
• Weight: 383 KB
• Volume: 165-166
• Category: Article
• ISSN: 0921-4526
• DOI: 10.1016/s0921-4526(09)80334-7

✦ Synopsis

High quality YBa2Cu307 thin films have been grown in situ on various substrates using MBE techniques and an ozone jet The best films so far were grown on SrTi03 and had a Tc,onset of 88 K and a TcO of 80 K. One 200 nm thick film grown on bare silicon had a TC,onset of 88 K and a TcO of 60 K. This film showed no or negligible superconductor substrate interactions according to RBS measurements.