Low-Temperature ALD Growth of SrTiO3 Thin Films from Sr β-Diketonates and Ti Alkoxide Precursors Using Oxygen Remote Plasma as an Oxidation Source

✍ Scribed by D.-S. Kil; J.-M. Lee; J.-S. Roh

• Publisher: John Wiley and Sons
• Year: 2002
• Tongue: English
• Weight: 196 KB
• Volume: 8
• Category: Article
• ISSN: 0948-1907
• DOI: 10.1002/1521-3862(20020903)8:5<195::aid-cvde195>3.0.co;2-9