## Photo-induced hydrophilic Oxygen flow ratio Self cleaning TiO 2 thin films were deposited by reactive radio frequency magnetron sputtering of Ti target at low working pressure (1 mTorr) and various O 2 and Ar flow ratios (R O2 = O 2 /(O 2 + Ar)). Properties of TiO 2 films were measured by field
โฆ LIBER โฆ
Growth of TiO2 thin film by reactive RF magnetron sputtering using oxygen radical
โ Scribed by H. Ogawa; T. Higuchi; A. Nakamura; S. Tokita; D. Miyazaki; T. Hattori; T. Tsukamoto
- Book ID
- 116600477
- Publisher
- Elsevier Science
- Year
- 2008
- Tongue
- English
- Weight
- 227 KB
- Volume
- 449
- Category
- Article
- ISSN
- 0925-8388
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