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Growth of TiO2 thin film by reactive RF magnetron sputtering using oxygen radical

โœ Scribed by H. Ogawa; T. Higuchi; A. Nakamura; S. Tokita; D. Miyazaki; T. Hattori; T. Tsukamoto


Book ID
116600477
Publisher
Elsevier Science
Year
2008
Tongue
English
Weight
227 KB
Volume
449
Category
Article
ISSN
0925-8388

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