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Effect of growth conditions on formation of TiO2-II thin films in atomic layer deposition process

✍ Scribed by Jaan Aarik; Aleks Aidla; Väino Sammelselg; Teet Uustare

Book ID
108342539
Publisher
Elsevier Science
Year
1997
Tongue
English
Weight
403 KB
Volume
181
Category
Article
ISSN
0022-0248

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