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Effect of nitrogen doping concentration on the properties of TiO2 films grown by atomic layer deposition

✍ Scribed by Hsyi-En Cheng; Yu-Ru Chen; Wen-Tuan Wu; Ching-Ming Hsu

Publisher: Elsevier Science
Year: 2011
Tongue: English
Weight: 579 KB
Volume: 176
Category: Article
ISSN: 0921-5107
DOI: 10.1016/j.mseb.2011.02.001

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