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Atomic layer deposition of TiO2thin films on nanoporous alumina templates: Medical applications

✍ Scribed by Roger J. Narayan; Nancy A. Monteiro-Riviere; Robin L. Brigmon; Michael J. Pellin; Jeffrey W. Elam

Book ID
107524433
Publisher
The Minerals, Metals & Materials Society
Year
2009
Tongue
English
Weight
445 KB
Volume
61
Category
Article
ISSN
1047-4838

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Atomic layer deposition of TiO2 films on
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✍ David M. King; Xinhua Liang; Yun Zhou; Casey S. Carney; Luis F. Hakim; Peng Li; πŸ“‚ Article πŸ“… 2008 πŸ› Elsevier Science 🌐 English βš– 793 KB

Atomic layer deposition (ALD) of controlled-thickness TiO 2 films was carried out on particle substrates in a fluidized bed reactor for the first time. Films were deposited on 550 nm SiO 2 spheres and 65 nm ZnO nanoparticles for enhanced optical properties. Nanoparticles were fluidized with the assi