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Atomic Layer Deposition of BaTiO3 Thin Films—Effect of Barium Hydroxide Formation

✍ Scribed by M. Vehkamäki; T. Hatanpää; M. Ritala; M. Leskelä; S. Väyrynen; E. Rauhala

Publisher
John Wiley and Sons
Year
2007
Tongue
English
Weight
394 KB
Volume
13
Category
Article
ISSN
0948-1907

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## Abstract Presented in this paper is a study of the biocompatibility of an atomic layer‐deposited (ALD) alumina (Al~2~O~3~) thin film and an ALD hydrophobic coating on standard glass cover slips. The pure ALD alumina coating exhibited a water contact angle of 55° ± 5° attributed, in part, to a hi