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In-situ doping of erbium in hydrogenated amorphous carbon by low temperature metalorganic radio frequency plasma enhanced chemical vapor deposition

✍ Scribed by Hsu, Hui-Lin; Leong, Keith R.; Halamicek, Michael; Teng, I-Ju; Mahtani, Pratish; Juang, Jenh-Yih; Jian, Sheng-Rui; Qian, Li; Kherani, Nazir P.

Book ID: 122273120
Publisher: Elsevier Science
Year: 2014
Tongue: English
Weight: 541 KB
Volume: 570
Category: Article
ISSN: 0040-6090
DOI: 10.1016/j.tsf.2014.02.038

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