✦ LIBER ✦

In-process control of Co silicide formation by RTA

✍ Scribed by J-M. Dilhac; C. Ganibal; N. Nolhier; P.B. Moynagh; C.P. Chew; P.J. Rosser

Publisher: Elsevier Science
Year: 1992
Tongue: English
Weight: 229 KB
Volume: 19
Category: Article
ISSN: 0167-9317
DOI: 10.1016/0167-9317(92)90458-4

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

RBS studies of As redistribution during

RBS studies of As redistribution during silicide formation by RTA

✍ Zhou Wei; Yang Genqing; Yu Ning; Zhou Zuyao; Zou Shihchang 📂 Article 📅 1989 🏛 Elsevier Science 🌐 English ⚖ 452 KB

In-process control of silicide formation

In-process control of silicide formation during rapid thermal processing

✍ J.-M. Dilhac; C. Ganibal; N. Nolhier; P.B. Moynagh; C.P. Chew; P.J. Rosser 📂 Article 📅 1993 🏛 Elsevier Science 🌐 English ⚖ 202 KB

Silicide formation for Co/Ti/Si structur

Silicide formation for Co/Ti/Si structures processed by RTP under vacuum

✍ M. Setton; J. Van Der Spiegel 📂 Article 📅 1989 🏛 Elsevier Science 🌐 English ⚖ 541 KB

On the formation of silicides on poly ru

On the formation of silicides on poly runners with topography by a two-step silicidation process

✍ Franky Jonckx; Rita Verbeeck; Bruno Deweerdt; Karen Maex 📂 Article 📅 1995 🏛 Elsevier Science 🌐 English ⚖ 899 KB

Formation of NiCoSix silicide by thermal

Formation of NiCoSix silicide by thermal annealing of Ni/Co bilayer on Si substrate

✍ Ohsung Song; Dugjoong Kim; C.S. Yoon; C.K. Kim 📂 Article 📅 2005 🏛 Elsevier Science 🌐 English ⚖ 249 KB

In situ study of the formation of silici

In situ study of the formation of silicide phases in amorphous Co–Si mixed layers

✍ C. Van Bockstael; K. De Keyser; J. Demeulemeester; A. Vantomme; R.L. Van Meirhae 📂 Article 📅 2010 🏛 Elsevier Science 🌐 English ⚖ 425 KB

We investigate Co silicide phase formation when extra Si is added within an as deposited 50 nm Co film. The addition of Si is investigated for both the Co/SiO 2 and Co/Si(1 0 0) system. A series of 10 Co-Si mixed films with a Si content varying from 21 to 59 at.% was prepared and investigated during