RBS studies of As redistribution during silicide formation by RTA

✍ Scribed by Zhou Wei; Yang Genqing; Yu Ning; Zhou Zuyao; Zou Shihchang

• Publisher: Elsevier Science
• Year: 1989
• Tongue: English
• Weight: 452 KB
• Volume: 39
• Category: Article
• ISSN: 0042-207X
• DOI: 10.1016/0042-207x(89)90185-1