Failure of zirconium silicide contacts during the silicidation process studied by AES and RBS

✍ Scribed by WS Brooks; TE Derry; JPF Sellschop; RG Cooperthwaite; L Kusztelan; AGK Lutsch

• Publisher: Elsevier Science
• Year: 1988
• Tongue: English
• Weight: 335 KB
• Volume: 38
• Category: Article
• ISSN: 0042-207X
• DOI: 10.1016/0042-207x(88)90093-0