✦ LIBER ✦
Silicide formation for Co/Ti/Si structures processed by RTP under vacuum
✍ Scribed by M. Setton; J. Van Der Spiegel
- Publisher
- Elsevier Science
- Year
- 1989
- Tongue
- English
- Weight
- 541 KB
- Volume
- 38
- Category
- Article
- ISSN
- 0169-4332
No coin nor oath required. For personal study only.