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On the formation of silicides on poly runners with topography by a two-step silicidation process

✍ Scribed by Franky Jonckx; Rita Verbeeck; Bruno Deweerdt; Karen Maex

Publisher: Elsevier Science
Year: 1995
Tongue: English
Weight: 899 KB
Volume: 91
Category: Article
ISSN: 0169-4332
DOI: 10.1016/0169-4332(95)00150-6

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