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In-plane distortion in silicon wafers induced by a submicron CMOS process

✍ Scribed by Venkat Raman Nagaswami

Book ID: 107920393
Publisher: Elsevier Science
Year: 1989
Tongue: English
Weight: 435 KB
Volume: 9
Category: Article
ISSN: 0167-9317
DOI: 10.1016/0167-9317(89)90100-7

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