All-optical measurement of in-plane and out-of-plane Young's modulus and Poisson's ratio in silicon wafers by means of vibration modes

✍ Scribed by França, D R; Blouin, A

• Book ID: 120279477
• Publisher: Institute of Physics
• Year: 2004
• Tongue: English
• Weight: 324 KB
• Volume: 15
• Category: Article
• ISSN: 0957-0233
• DOI: 10.1088/0957-0233/15/5/011