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Synchrotron X-ray topographic studies of the changes in defect microstructure induced by rapid thermal processing of single-crystal silicon wafers

✍ Scribed by Michael Dudley; Franklin F.Y. Wang; Thomas Fanning; Georgios Tolis; Wu Jun; David T. Hodul


Book ID
119124374
Publisher
Elsevier Science
Year
1990
Tongue
English
Weight
975 KB
Volume
10
Category
Article
ISSN
0167-577X

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