Synchrotron X-ray topographic studies of the changes in defect microstructure induced by rapid thermal processing of single-crystal silicon wafers

✍ Scribed by Michael Dudley; Franklin F.Y. Wang; Thomas Fanning; Georgios Tolis; Wu Jun; David T. Hodul

• Book ID: 119124374
• Publisher: Elsevier Science
• Year: 1990
• Tongue: English
• Weight: 975 KB
• Volume: 10
• Category: Article
• ISSN: 0167-577X
• DOI: 10.1016/0167-577x(90)90037-m