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Impurity profiles in thin, lightly doped, vacuum diffused layers of silicon

✍ Scribed by Batdorf, B.; Lee, L.; Wiegmann, W.

Book ID: 117903901
Publisher: Institute of Electrical and Electronics Engineers
Year: 1962
Tongue: English
Weight: 197 KB
Volume: 9
Category: Article
ISSN: 0096-2430
DOI: 10.1109/t-ed.1962.15069

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