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Concentration profiles of antimony-doped shallow layers in silicon

✍ Scribed by Alzanki, T; Gwilliam, R; Emerson, N; Tabatabaian, Z; Jeynes, C; Sealy, B J

Book ID
111958081
Publisher
Institute of Physics
Year
2004
Tongue
English
Weight
177 KB
Volume
19
Category
Article
ISSN
0268-1242

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