✦ LIBER ✦

Improvement of the Si-SiO2 interface stress resistance of thin gate oxides after channel ion implantation

✍ Scribed by R.B. Calligaro

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Recovery of the Si–SiO2 interface studie

✍ H. Karl; Ch. Delpero; P. Huber; B. Stritzker 📂 Article 📅 2006 🏛 Elsevier Science 🌐 English ⚖ 126 KB

Deep trapping of implanted Na+ and Li+ i

✍ G. Greeuw; J.F. Verwey 📂 Article 📅 1985 🏛 Elsevier Science 🌐 English ⚖ 663 KB

Thin SiO2 films formed by oxygen ion imp

✍ J. Dylewski; M.C. Joshi 📂 Article 📅 1976 🏛 Elsevier Science 🌐 English ⚖ 967 KB

Deep trapping of implanted Na+ and Li+ i

📂 Article 📅 1986 🏛 Elsevier Science 🌐 English ⚖ 132 KB