✦ LIBER ✦

Improvement of sidewall roughness in deep silicon etching

✍ Scribed by M. Chabloz; Y. Sakai; T. Matsuura; K. Tsutsumi

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Sidewall roughness control in advanced s

✍ H.-C. Liu; Y.-H. Lin; W. Hsu 📂 Article 📅 2003 🏛 Springer-Verlag 🌐 English ⚖ 501 KB

Improvement of sidewall surface roughnes

✍ F. Gao; Y. Wang; G. Cao; X. Jia; F. Zhang 📂 Article 📅 2005 🏛 Springer 🌐 English ⚖ 366 KB

Improving the sidewall quality of nanose

✍ Chao-Wei Tang; Kuan-Ming Li; Hong-Tsu Young 📂 Article 📅 2012 🏛 The Institution of Engineering and Technology 🌐 English ⚖ 198 KB

Analysis of sidewall quality in through-

✍ W.T. Pike; W.J. Karl; S. Kumar; S. Vijendran; T. Semple 📂 Article 📅 2004 🏛 Elsevier Science 🌐 English ⚖ 612 KB

Wet etching of silicon structures bounde

✍ D Resnik; D Vrtacnik; U Aljancic; S Amon 📂 Article 📅 2000 🏛 Elsevier Science 🌐 English ⚖ 846 KB

Deep trench etching in macroporous silic

✍ T. Geppert; S.L. Schweizer; U. Gösele; R.B. Wehrspohn 📂 Article 📅 2006 🏛 Springer 🌐 English ⚖ 611 KB