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Deep trench etching in macroporous silicon

✍ Scribed by T. Geppert; S.L. Schweizer; U. Gösele; R.B. Wehrspohn

Publisher: Springer
Year: 2006
Tongue: English
Weight: 611 KB
Volume: 84
Category: Article
ISSN: 1432-0630
DOI: 10.1007/s00339-006-3628-7

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